Open AccessInvestigation of target erosion profiles sputter-eroded by a low-energy broad ion beam
Author(s) -
Wjatscheslaw Sakiew,
Eileen Klocke,
Detlev Ristau
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/6.0000909
Subject(s) - sputtering , erosion , silicon , materials science , ion beam , coating , ion , beam (structure) , ion implantation , atomic physics , composite material , optics , chemistry , optoelectronics , nanotechnology , thin film , physics , geology , paleontology , organic chemistry
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