Novel fabrication tools for dynamic compression targets with engineered voids using photolithography methods
Author(s) -
Silvia Pandolfi,
Thomas E. Carver,
Daniel Hodge,
Andrew F. T. Leong,
Kelin Kurzer-Ogul,
Philip Hart,
Eric Galtier,
Dimitri Khaghani,
Eric Cunningham,
Bob Nagler,
Hae Ja Lee,
C. A. Bolme,
Kyle Ramos,
Kenan Li,
Yanwei Liu,
Anne Sakdinawat,
Stefano Marchesini,
Paweł Kozłowski,
C. B. Curry,
Franz-Joseph Decker,
Sharon Vetter,
Jessica K. Shang,
Hussein Aluie,
Matthew S. Dayton,
D. S. Montgomery,
Richard L. Sandberg,
A. E. Gleason
Publication year - 2022
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/5.0107542
Subject(s) - fabrication , materials science , void (composites) , dynamic range compression , photolithography , national ignition facility , nanotechnology , laser , inertial confinement fusion , composite material , optics , medicine , alternative medicine , physics , pathology
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