Large lateral contact stiffness on Si nanopillar surfaces
Author(s) -
Yuki Ishii,
Ryoto Yanagisawa,
Nobuyuki Watanabe,
Masahiro Nomura,
Naruo Sasaki,
Kouji Miura
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0082255
Subject(s) - nanopillar , pillar , materials science , micrometer , stiffness , composite material , atomic force microscopy , nanotechnology , nanometre , nanostructure , optics , structural engineering , physics , engineering
We studied the lateral contact stiffness ([Formula: see text]) between the tip of a frictional force microscope and a pillar surface to identify the sliding behavior of the tip at the submicrometer scale. The [Formula: see text] and mean lateral force (⟨ F⟩) were systematically measured as functions of pillar diameter φ. We found that the [Formula: see text] on a single Si pillar surface increased whereas the ⟨ F⟩ rapidly decreased as φ decreased from the micrometer to the nanometer scale. This contradiction could be explained by the change in tip behavior from dynamic sliding to static sticking.
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