Open AccessWet-based digital etching on GaN and AlGaN
Author(s) -
Pao-Chuan Shih,
Zachary Engel,
Habib Ahmad,
W. Alan Doolittle,
Tomás Palacios
Publication year - 2022
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0074443
Subject(s) - etching (microfabrication) , materials science , optoelectronics , dry etching , nanowire , fabrication , isotropic etching , nitride , nanostructure , planar , layer (electronics) , nanotechnology , gallium nitride , computer science , medicine , alternative medicine , computer graphics (images) , pathology
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