Open AccessDetermination of piezo-resistive coefficient π44 in p-type silicon by comparing simulation and measurement of pressure sensors
Author(s) -
Kevin Lauer,
Geert Brokmann,
M. Bähr,
Thomas Ortlepp
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0060034
Subject(s) - resistive touchscreen , silicon , sensitivity (control systems) , materials science , pressure sensor , pressure measurement , dopant , type (biology) , pressure coefficient , temperature coefficient , analytical chemistry (journal) , optoelectronics , doping , physics , chemistry , thermodynamics , electronic engineering , electrical engineering , composite material , engineering , chromatography , ecology , biology
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