Open AccessResidual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy
Author(s) -
James Spencer Lundh,
Kathleen Coleman,
Yiwen Song,
Benjamin A. Griffin,
Giovanni Esteves,
E Douglas,
Adam Edstrand,
Ştefan C. Bǎdescu,
Elizabeth A. Moore,
Jacob H. Leach,
Baxter Moody,
Susan TrolierMcKinstry,
Sukwon Choi
Publication year - 2021
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0056302
Subject(s) - residual stress , materials science , raman spectroscopy , stress (linguistics) , piezoelectricity , nitride , wafer , electromechanical coupling coefficient , composite material , optoelectronics , optics , layer (electronics) , linguistics , philosophy , physics
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