Open AccessResidual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy
Author(s) -
James Spencer Lundh,
Kathleen Coleman,
Yiwen Song,
Benjamin A. Griffin,
Giovanni Esteves,
Erica Ann Douglas,
Adam Edstrand,
Ştefan C. Bădescu,
Elizabeth A. Moore,
J. H. Leach,
Baxter Moody,
Susan TrolierMcKinstry,
Sukwon Choi
Publication year - 2021
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0056302
Subject(s) - residual stress , materials science , raman spectroscopy , stress (linguistics) , piezoelectricity , nitride , wafer , electromechanical coupling coefficient , composite material , optoelectronics , optics , layer (electronics) , linguistics , philosophy , physics