Open AccessAl0.68Sc0.32N Lamb wave resonators with electromechanical coupling coefficients near 10.28%
Author(s) -
Giovanni Esteves,
Travis Ryan Young,
Zichen Tang,
Sean Yen,
Travis Bauer,
Michael David Henry,
Roy H. Olsson
Publication year - 2021
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0047647
Subject(s) - resonator , figure of merit , scandium , materials science , condensed matter physics , dissipation factor , coupling (piping) , q factor , electromechanical coupling coefficient , optoelectronics , piezoelectricity , nitride , physics , composite material , dielectric , metallurgy , layer (electronics)