Open AccessThe influence of temperature and TMGa flow rate on the quality of p-GaN
Author(s) -
Zikun Cao,
Xiaowei Wang,
Degang Zhao,
Feng Liang,
Zongshun Liu
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0045393
Subject(s) - materials science , secondary ion mass spectroscopy , surface roughness , photoluminescence , volumetric flow rate , impurity , growth rate , surface finish , analytical chemistry (journal) , gallium , electron mobility , electrical resistivity and conductivity , optoelectronics , composite material , metallurgy , chemistry , thermodynamics , silicon , electrical engineering , physics , geometry , organic chemistry , mathematics , chromatography , engineering
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