Open AccessInterlayer couplings in silicon/oxide/nitride thin films via laser crystallizations
Author(s) -
Minyeong Kim,
Min Jin Kang,
Eui Sun Hwang,
ByoungHo Cheong
Publication year - 2021
Publication title -
aip advances
Language(s) - Italian
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0045095
Subject(s) - materials science , amorphous solid , optoelectronics , silicon nitride , laser , thin film , resonance (particle physics) , crystallization , substrate (aquarium) , amorphous silicon , guided mode resonance , optics , nitride , wavelength , silicon , layer (electronics) , crystalline silicon , diffraction grating , nanotechnology , chemistry , crystallography , physics , oceanography , organic chemistry , particle physics , geology
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