Open AccessPost-growth modulation doping by ion implantation
Author(s) -
Po-Yuan Chiu,
David Lidsky,
Yen Chuang,
Yu-Chia Su,
J.-Y. Li,
Charles Thomas Harris,
T. M. Lu
Publication year - 2020
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0031992
Subject(s) - heterojunction , dopant , materials science , doping , ion implantation , optoelectronics , dopant activation , quantum well , modulation (music) , fluence , electron mobility , ion , chemistry , optics , physics , laser , organic chemistry , acoustics