Open AccessLateral variations of the surface electric potential and elastic stiffness of ultrathin Hf0.5Zr0.5O2 films on silicon
Author(s) -
Leonid Bolotov,
Noriyuki Uchida,
Shinji Migita
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0029547
Subject(s) - materials science , piezoresponse force microscopy , ferroelectricity , elastic modulus , tetragonal crystal system , kelvin probe force microscope , crystallite , scanning probe microscopy , composite material , monoclinic crystal system , silicon , surface roughness , optoelectronics , dielectric , nanotechnology , crystallography , crystal structure , atomic force microscopy , metallurgy , chemistry
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