Open AccessSimilarity law and frequency scaling in low-pressure capacitive radio frequency plasmas
Author(s) -
Yangyang Fu,
Bocong Zheng,
DeQi Wen,
Peng Zhang,
Qi Hua Fan,
John Verboncoeur
Publication year - 2020
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0029518
Subject(s) - scaling , frequency scaling , electron , radio frequency , kinetic energy , physics , capacitive sensing , electron density , plasma , power law , atomic physics , computational physics , power (physics) , quantum mechanics , mathematics , electrical engineering , statistics , geometry , engineering