Open AccessStructural transition and recovery of Ge implanted β -Ga2O3
Author(s) -
Elaf A. Anber,
Daniel J. Foley,
Andrew C. Lang,
James E. Nathaniel,
James L. Hart,
Marko J. Tadjer,
Karl D. Hobart,
S. J. Pearton,
Mitra L. Taheri
Publication year - 2020
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0022170
Subject(s) - ion implantation , annealing (glass) , materials science , transmission electron microscopy , electron diffraction , fluence , analytical chemistry (journal) , scanning electron microscope , ion , diffraction , crystallography , nanotechnology , chemistry , optics , composite material , physics , organic chemistry , chromatography