Open AccessThermal stability of α-Ga2O3 films grown on c-plane sapphire substrates via mist-CVD
Author(s) -
Riena Jinno,
Kentaro Kaneko,
Shizυo Fujita
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0020464
Subject(s) - sapphire , materials science , thermal stability , annealing (glass) , corundum , diffraction , thermal expansion , residual stress , transmission electron microscopy , analytical chemistry (journal) , x ray crystallography , crystallography , composite material , optics , chemistry , nanotechnology , laser , physics , organic chemistry , chromatography
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