Open AccessMolecular dynamics investigation of material deformation behavior of PMMA in nanoimprint lithography
Author(s) -
Jahlani Odujole,
Salil Desai
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0014458
Subject(s) - materials science , nanoimprint lithography , composite material , resist , thermoplastic , indentation , deformation (meteorology) , nanoindentation , polymer , penetration depth , tribology , fabrication , optics , medicine , alternative medicine , physics , pathology , layer (electronics)
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