Open AccessEvaluation of the mechanical properties of germanium-on-insulator (GeOI) films by Raman spectroscopy and nanoindentation
Author(s) -
Yousuf Mohammed,
Kai Zhang,
S. Heißler,
Helmut Baumgart,
A.A. Elmustafa
Publication year - 2020
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0013454
Subject(s) - nanoindentation , materials science , raman spectroscopy , germanium , indentation , composite material , wafer , silicon , nanotechnology , optics , optoelectronics , physics
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