Open AccessExperimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures
Author(s) -
Jianxing Xu,
Xiaodong Tong,
Shiyong Zhang,
Zhe Cheng,
Lian Zhang,
Penghui Zheng,
Fengxiang Chen,
Rong Wang,
Yun Zhang,
Wei Tan
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0005091
Subject(s) - heterojunction , materials science , ohmic contact , etching (microfabrication) , optoelectronics , annealing (glass) , wide bandgap semiconductor , fluorine , degradation (telecommunications) , current density , electronic engineering , nanotechnology , composite material , layer (electronics) , metallurgy , physics , quantum mechanics , engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom