Open AccessImpacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition
Author(s) -
Fabi Zhang,
Congyu Hu,
Makoto Arita,
Katsuhiko Saito,
Tooru Tanaka,
Qixin Guo
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5140822
Subject(s) - oxygen , materials science , pulsed laser deposition , evaporation , monoclinic crystal system , thin film , surface roughness , deposition (geology) , ultraviolet , transmittance , analytical chemistry (journal) , chemistry , crystal structure , nanotechnology , optoelectronics , crystallography , environmental chemistry , composite material , physics , organic chemistry , thermodynamics , paleontology , sediment , biology
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