Open AccessRoller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements
Author(s) -
Man Zhang,
Liangping Xia,
Suihu Dang,
Axiu Cao,
Lifang Shi,
Chunlei Du
Publication year - 2020
Publication title -
aip advances
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5137755
Subject(s) - nanoimprint lithography , materials science , fabrication , diffraction , diffraction efficiency , optics , soft lithography , lithography , x ray lithography , nanolithography , optoelectronics , diffraction grating , grating , resist , nanotechnology , medicine , physics , alternative medicine , pathology , layer (electronics)
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