Open AccessA high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy
Author(s) -
Atefeh Alipour,
M. Bulut Coşkun,
S. O. Reza Moheimani
Publication year - 2019
Publication title -
review of scientific instruments online/review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.5109900
Subject(s) - scanning tunneling microscope , bandwidth (computing) , highly oriented pyrolytic graphite , scanner , microelectromechanical systems , materials science , lithography , optoelectronics , optics , computer science , physics , nanotechnology , telecommunications