Open AccessNumerical model of the radio-frequency magnetic presheath including wall impurities
Author(s) -
Moutaz Elias,
Davide Curreli,
Thomas G. Jenkins,
J. R. Myra,
J. C. Wright
Publication year - 2019
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/1.5109256
Subject(s) - physics , impurity , plasma , atomic physics , sputtering , ion , computational physics , cyclotron resonance , magnetic field , cyclotron , nuclear physics , thin film , quantum mechanics