Open AccessNanoscale limits of angular optical scatterometry
Author(s) -
Ruichao Zhu,
Juan J. Faria-Briceno,
S. R. J. Brueck,
Praveen Joseph,
Shrawan Singhal,
S. V. Sreenivasan
Publication year - 2020
Publication title -
aip advances
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5092802
Subject(s) - optics , grating , metrology , materials science , resist , critical dimension , rigorous coupled wave analysis , wavelength , lithography , diffraction grating , physics , nanotechnology , layer (electronics)
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