Open AccessEffect of heat treatment on thermoelectric properties of tungsten-rhenium thin-film thermocouples by RF magnetron sputtering
Author(s) -
Zhongkai Zhang,
Bian Tian,
Zhe Du,
Qijing Lin,
Peng Shi,
Wei Ren,
Na Zhao,
Zhuangde Jiang
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5074126
Subject(s) - rhenium , thermocouple , thermoelectric effect , materials science , tungsten , sputter deposition , seebeck coefficient , thermopile , repeatability , thermoelectric materials , optoelectronics , cavity magnetron , metallurgy , sputtering , electronic engineering , composite material , thin film , thermal conductivity , thermodynamics , optics , chemistry , infrared , nanotechnology , physics , chromatography , engineering
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