Open AccessFactors affecting the properties of highly conductive flexible ultrathin ITO films in confined large area magnetron sputtering in three dimensions
Author(s) -
Bibhuti B. Sahu,
Long Wen,
Ji Hye Kwon,
Jeon G. Han
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5053570
Subject(s) - materials science , electrical resistivity and conductivity , sputter deposition , crystallinity , cavity magnetron , sputtering , deposition (geology) , plasma , analytical chemistry (journal) , thin film , transmittance , ion , optoelectronics , composite material , nanotechnology , chemistry , paleontology , engineering , chromatography , sediment , electrical engineering , biology , physics , organic chemistry , quantum mechanics
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