Open AccessResidual stress analysis and control of multilayer flexible moisture barrier films with SiNx and Al2O3 layers
Author(s) -
Jang Soon Park,
Sang Heon Yong,
You Jin Choi,
Heeyeop Chae
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5037953
Subject(s) - materials science , residual stress , composite material , polyethylene naphthalate , plasma enhanced chemical vapor deposition , atomic layer deposition , layer (electronics) , chemical vapor deposition , silicon nitride , nanotechnology
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