Open AccessComparative study of Ar-implanted Ti-Zr-V non-evaporable getter films on the Al-alloy substrate
Author(s) -
Ling-Hui Wu,
TingChun Lin,
Chia-Mu Cheng,
Chin-Chun Chang,
Che-Kai Chan,
Shen-Yaw Perng,
I-Ching Sheng
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5034196
Subject(s) - materials science , diffractometer , getter , transmission electron microscopy , scanning electron microscope , titanium , analytical chemistry (journal) , substrate (aquarium) , alloy , zirconium , crystallography , metallurgy , composite material , nanotechnology , chemistry , optoelectronics , oceanography , chromatography , geology
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