Open AccessCharacterizing the dominant ions in low-temperature argon plasmas in the range of 1–800 Torr
Author(s) -
Yangyang Fu,
Janez Krek,
Guy Parsey,
John Verboncoeur
Publication year - 2018
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/1.5020097
Subject(s) - ion , argon , atomic physics , dissociation (chemistry) , plasma , torr , electron temperature , dissociative recombination , atom (system on chip) , chemistry , physics , recombination , biochemistry , quantum mechanics , gene , computer science , thermodynamics , embedded system , organic chemistry