Open AccessFabrication of n-type Si nanostructures by direct nanoimprinting with liquid-Si ink
Author(s) -
Hideyuki Takagishi,
Takashi Masuda,
Ken Yamazaki,
Tatsuya Shimoda
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5011449
Subject(s) - materials science , silicon , nanostructure , amorphous solid , polycrystalline silicon , fabrication , substrate (aquarium) , photolithography , amorphous silicon , nanolithography , etching (microfabrication) , nanotechnology , crystallite , lithography , optoelectronics , chemical engineering , layer (electronics) , crystalline silicon , crystallography , chemistry , metallurgy , medicine , alternative medicine , oceanography , pathology , geology , engineering , thin film transistor