Open AccessAlGaN/GaN pressure sensor with a Wheatstone bridge structure
Author(s) -
Xin Tan,
Yuanjie Lv,
Xinyu Zhou,
Y. G. Wang,
Xubo Song,
G. D. Gu,
Peng Ji,
Xuelin Yang,
Bo Shen,
Zhihong Feng,
Shujun Cai
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4996257
Subject(s) - wheatstone bridge , materials science , pressure sensor , optoelectronics , linearity , resistor , silicon , voltage , heterojunction , piezoelectricity , isotropy , substrate (aquarium) , electrical engineering , composite material , optics , physics , thermodynamics , engineering , oceanography , geology
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