Open AccessA nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
Author(s) -
DeQi Wen,
Emi Kawamura,
M. A. Lieberman,
A. J. Lichtenberg,
YouNian Wang
Publication year - 2017
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/1.4993798
Subject(s) - physics , harmonics , antisymmetric relation , capacitive sensing , harmonic , voltage , atomic physics , acoustics , electrical engineering , quantum mechanics , engineering , mathematical physics