Open AccessImpact of laser anneal on NiPt silicide texture and chemical composition
Author(s) -
Céline Feautrier,
Ahmet Özcan,
C. Lavoie,
Alexia Valéry,
R. Beneyton,
C. Borowiak,
L. Clément,
Alexandre Pofelski,
B. Salem
Publication year - 2017
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4985279
Subject(s) - silicide , materials science , annealing (glass) , epitaxy , microstructure , texture (cosmology) , transmission electron microscopy , thin film , silicon , optoelectronics , analytical chemistry (journal) , metallurgy , composite material , nanotechnology , layer (electronics) , chemistry , chromatography , artificial intelligence , computer science , image (mathematics)