Open AccessEffect of oxygen vacancies and strain on the phonon spectrum of HfO2 thin films
Author(s) -
Lingyuan Gao,
Eilam Yalon,
Annabel R. Chew,
Sanchit Deshmukh,
Alberto Salleo,
Eric Pop,
Alexander A. Demkov
Publication year - 2017
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4984833
Subject(s) - raman spectroscopy , phonon , monoclinic crystal system , oxygen , materials science , strain (injury) , condensed matter physics , molecular vibration , thin film , molecular physics , chemistry , crystallography , nanotechnology , crystal structure , optics , physics , medicine , organic chemistry