Open AccessAnalysis of non-equilibrium phenomena in inductively coupled plasma generators
Author(s) -
W. Zhang,
Andrea Lani,
Marco Panesi
Publication year - 2016
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/1.4958326
Subject(s) - physics , equilibrium thermodynamics , thermodynamics , non equilibrium thermodynamics , thermodynamic equilibrium , plasma , chemical equilibrium , thermal equilibrium , plasma modeling , work (physics) , statistical physics , quantum mechanics