Open AccessFully CMOS-compatible titanium nitride nanoantennas
Author(s) -
Justin A. Briggs,
Gururaj V. Naik,
Trevor A. Petach,
B. Baum,
David GoldhaberGordon,
Jennifer A. Dionne
Publication year - 2016
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4941413
Subject(s) - materials science , nanophotonics , titanium nitride , plasmon , optoelectronics , silicon , atomic layer deposition , tin , nanopillar , silicon nitride , nitride , nanotechnology , thin film , layer (electronics) , nanostructure , metallurgy
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