Open AccessControlled exfoliation of (100) GaAs-based devices by spalling fracture
Author(s) -
Cassi A. Sweet,
Kevin L. Schulte,
John Simon,
Myles A. Steiner,
Nikhil Jain,
David L. Young,
Aaron J. Ptak,
Corinne E. Packard
Publication year - 2016
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4939661
Subject(s) - spall , materials science , wafer , fracture (geology) , composite material , residual stress , substrate (aquarium) , fracture mechanics , optoelectronics , forensic engineering , metallurgy , oceanography , engineering , geology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom