Open AccessIn-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering
Author(s) -
Matthew J. Highland,
Dillon D. Fong,
Guangxu Ju,
Carol Thompson,
P. M. Baldo,
P. H. Fuoss,
J. A. Eastman
Publication year - 2015
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4929753
Subject(s) - sputter deposition , epitaxy , sputtering , materials science , in situ , thin film , synchrotron , cavity magnetron , stoichiometry , analytical chemistry (journal) , deposition (geology) , scattering , optoelectronics , optics , chemistry , nanotechnology , physics , geology , paleontology , organic chemistry , layer (electronics) , chromatography , sediment
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