Open AccessPublisher’s Note: “Growth of residual stress-free ZnO films on SiO2/Si substrate at room temperature for MEMS devices” [AIP Advances 5, 067140 (2015)]
Author(s) -
Jitendra Kumar Singh,
Sapana Ranwa,
Jamil Akhtar,
Mahesh Kumar
Publication year - 2015
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4926425
Subject(s) - residual stress , substrate (aquarium) , microelectromechanical systems , materials science , optoelectronics , wide bandgap semiconductor , stress (linguistics) , silicon , nanotechnology , engineering physics , metallurgy , engineering , geology , linguistics , oceanography , philosophy