Open AccessLinking strain anisotropy and plasticity in copper metallization
Author(s) -
Conal E. Murray,
Jean JordanSweet,
Deepika Priyadarshini,
S. Nguyen
Publication year - 2015
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4919788
Subject(s) - anisotropy , materials science , copper , plasticity , diffraction , condensed matter physics , strain (injury) , composite material , crystallography , metallurgy , optics , chemistry , physics , medicine
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