Open AccessUltraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion
Author(s) -
DongJin Lee,
SunKyu Lee
Publication year - 2015
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.4905897
Subject(s) - ultrasonic motor , linear motor , control theory (sociology) , controller (irrigation) , position (finance) , ultrasonic sensor , materials science , compensation (psychology) , motion control , trajectory , acoustics , mechanics , computer science , physics , mechanical engineering , robot , engineering , vibration , psychology , agronomy , control (management) , finance , astronomy , artificial intelligence , psychoanalysis , economics , biology
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