Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films | Zendy

Takeshi Kobayashi | Zendy; Y. Suzuki | Zendy; Natsumi Makimoto | Zendy; Hiroshi Funakubo | Zendy; Ryutaro Maeda | Zendy

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Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films

Author(s) -

Takeshi Kobayashi,

Y. Suzuki,

Natsumi Makimoto,

Hiroshi Funakubo,

Ryutaro Maeda

Publication year - 2014

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4901912

Subject(s) - poling , piezoelectricity , materials science , thin film , microelectromechanical systems , pulse (music) , composite material , pmut , displacement (psychology) , optoelectronics , nanotechnology , voltage , dielectric , ferroelectricity , electrical engineering , psychology , engineering , psychotherapist

We have investigated the influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 (PZT) thin films. 1.9-μm-thick PZT thin films were deposited by sol-gel method and fabricated into microelectromechanical systems (MEMS) based piezoelectric microcantilevers. 1 kHz of unipolar or bipolar triangle pulse wave between 30-100 V was applied to the PZT thin films. The effective piezoelectric constant d31, under small signal actuation at 1-3 Vpp, was estimated from the tip displacement of the piezoelectric microcantilevers. The highest piezoelectric constant |d31| as high as 105 pm/V has been obtained by downward unipolar pulse poling at 100 V

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