Open AccessA two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms
Author(s) -
Roman Beigelbeck,
Michael Schneider,
J. Schalko,
Achim Bittner,
U. Schmid
Publication year - 2014
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4895835
Subject(s) - materials science , deflection (physics) , residual stress , ultimate tensile strength , modulus , composite material , young's modulus , structural engineering , optics , physics , engineering
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