High resolution capacitance detection circuit for rotor micro-gyroscope | Zendy

Mingyuan Ren | Zendy; Haifeng Zhang | Zendy; Xiaowei Liu | Zendy; Zhigang Mao | Zendy

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High resolution capacitance detection circuit for rotor micro-gyroscope

Author(s) -

Mingyuan Ren,

Haifeng Zhang,

Xiaowei Liu,

Zhigang Mao

Publication year - 2014

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4869239

Subject(s) - capacitance , gyroscope , noise (video) , parasitic capacitance , rotor (electric) , amplifier , demodulation , materials science , physics , electrical engineering , electrode , acoustics , electronic engineering , optoelectronics , computer science , cmos , engineering , channel (broadcasting) , quantum mechanics , artificial intelligence , image (mathematics)

Conventional methods for rotor position detection of micro-gyroscopes include common exciting electrodes (single frequency) and common sensing electrodes (frequency multiplex), but they have encountered some problems. So we present a high resolution and low noise pick-off circuit for micro-gyroscopes which utilizes the time multiplex method. The detecting circuit adopts a continuous-time current sensing circuit for capacitance measurement, and its noise analysis of the charge amplifier is introduced. The equivalent output noise power spectral density of phase-sensitive demodulation is 120 nV/Hz1/2. Tests revealed that the whole circuitry has a relative capacitance resolution of 1 × 10−8

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