Open AccessLaser-plasma source parameters for Kr, Gd, and Tb ions at 6.6 nm
Author(s) -
Majid Masnavi,
John Szilagyi,
Homaira Parchamy,
M. C. Richardson
Publication year - 2013
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4802789
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , ion , laser , plasma , atomic physics , radiative transfer , materials science , chemistry , optoelectronics , optics , physics , nuclear physics , organic chemistry
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