Thermomechanical noise measurement of polydimethylsiloxane microcantilevers fabricated by multilayer soft lithography | Zendy

Ting-Rong Yu | Zendy; YaTang Yang | Zendy

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Thermomechanical noise measurement of polydimethylsiloxane microcantilevers fabricated by multilayer soft lithography

Author(s) -

Ting-Rong Yu,

YaTang Yang

Publication year - 2013

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4794692

Subject(s) - polydimethylsiloxane , cantilever , materials science , soft lithography , lithography , characterization (materials science) , soft matter , optoelectronics , nanotechnology , composite material , chemistry , fabrication , medicine , alternative medicine , pathology , colloid

Polydimethylsiloxane microstructures such as cantilevers are useful for nanomechanical measurements of biomolecules, living cells, and soft matter. As a fundamental characterization, we report thermomechanical noise measurements of the flexural modes of polydimethylsiloxane cantilevers, which were fabricated by multilayer soft lithography. From the resonance frequency data, we extracted the values of Young's moduli for different cross-linking ratios. Our devices have measured resonance frequencies and quality factors ranging from 405 Hz to 1.63 kHz and from 5 to 10, respectively. Our analysis shows that these cantilevers will be able to perform nanomechanical measurements with piconewton force resolution

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