Open AccessStudies on ion scattering and sputtering processes in ion beam sputter-deposition of high Tc superconducting films: The optimization of deposition parameters
Author(s) -
M. S. Ameen,
Orlando Auciello,
Angus I. Kingon,
A.R. Krauss,
Mark Ray
Publication year - 1990
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.39032
Subject(s) - sputtering , ion , ion beam , materials science , deposition (geology) , sputter deposition , scattering , ion plating , ion beam deposition , microelectronics , atomic physics , ion beam assisted deposition , thin film , analytical chemistry (journal) , chemistry , optoelectronics , optics , nanotechnology , physics , paleontology , organic chemistry , chromatography , sediment , biology
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