Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method | Zendy

Qiushi Zhu | Zendy; Takahiro Muto | Zendy; Junzaburo Yamada | Zendy; Nozomu Kishi | Zendy; Masato Watanabe | Zendy; Akitoshi Okino | Zendy; Kazuhiko Horioka | Zendy; Eiki Hotta | Zendy

Open Access

Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method

Author(s) -

Qiushi Zhu,

Takahiro Muto,

Junzaburo Yamada,

Nozomu Kishi,

Masato Watanabe,

Akitoshi Okino,

Kazuhiko Horioka,

Eiki Hotta

Publication year - 2011

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.3672816

Subject(s) - plasma , atomic physics , extreme ultraviolet , extreme ultraviolet lithography , electron temperature , ionization , implosion , plasma diagnostics , laser , stark effect , plasma parameters , electron , electron density , full width at half maximum , materials science , chemistry , physics , electric field , optics , ion , organic chemistry , quantum mechanics

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