Open AccessSynthesis of nanocrystalline diamond thin films from an Ar–CH4 microwave plasma
Author(s) -
Daniel K. Zhou,
Thomas McCauley,
LuChang Qin,
A.R. Krauss,
D. M. Gruen
Publication year - 1998
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.366668
Subject(s) - nanocrystalline material , diamond , materials science , thin film , transmission electron microscopy , carbon film , material properties of diamond , hydrogen , analytical chemistry (journal) , chemical vapor deposition , grain size , electron energy loss spectroscopy , nanotechnology , chemistry , metallurgy , organic chemistry , chromatography
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