Open AccessOptical emission studies of reactive species in plasma deposition
Author(s) -
F. J. Kampas,
R. W. Griffith
Publication year - 1981
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.33076
Subject(s) - impurity , materials science , plasma , deposition (geology) , spectroscopy , glow discharge , emission spectrum , atomic physics , chemical physics , analytical chemistry (journal) , spectral line , chemistry , environmental chemistry , physics , paleontology , organic chemistry , quantum mechanics , astronomy , sediment , biology
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