Open AccessComposition and strain contrast of Si1−xGex (x=0.20) and Si1−yCy (y≤0.015) epitaxial strained films on (100) Si in annular dark field images
Author(s) -
Xiaozhi Wu,
J.M. Baribeau
Publication year - 2009
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.3082019
Subject(s) - materials science , epitaxy , analytical chemistry (journal) , dark field microscopy , scanning transmission electron microscopy , spectroscopy , transmission electron microscopy , detector , scattering , optics , chemistry , microscopy , physics , nanotechnology , layer (electronics) , chromatography , quantum mechanics
Peer reviewed: NoNRC publication: Ye
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