Open AccessElongation of extreme ultraviolet (at 13.5 nm) emission with time-of-flight controlled discharges and lateral fuel injection
Author(s) -
Tomonao Hosokai,
Takuma Yokoyama,
Alexei Zhidkov,
Hiroto Sato,
Eiki Hotta,
Kazuhiko Horioka
Publication year - 2008
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2975211
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , plasma , materials science , laser , wavelength , optics , optoelectronics , ultraviolet , radiation , common emitter , tin , physics , quantum mechanics , metallurgy
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